Have high rigidity and compactness in width. Support 30~50mm of travel distance.
Part Number
Configured Part Number is shown.
Part Number | - | Lead | - | Sensor | - | Motor | - | Cable |
XYZCVL630 | - | 1 | - | N | - | C | - | N |
Part Number | Lead (mm) |
Sensor | Motor | Cable | Mechanical Standards | Accuracy Standards | |||||
Type | No. | Stage Surface (mm) |
Travel Distance (mm) |
Weight (kg)*2 |
Unidirectional Positioning Accuracy (for a single axis stage horizontally placed) |
Pitching | Yawing | ||||
XYZCVL (w/o Cover) XYZCVLC (with Cover) |
630 | 1 (Lead 1mm) |
N (W/o Sensor) 1 (CCW Right) 2 (CCW Left) 3 (Right-center) 4 (Left-center) 5 (CW Right) 6 (CW Left) [ ! ]The Limit Sensor is built-in. |
C(Standard) F(High Torque) G(High Resolution) MA*1(With Electromagnetic Brake) PA*1(α-Step) U*1(Servo Motor, Amplifier) |
N(Cable not included (separately sold)) M*1(For Motor with Electromagnetic Brake) P*1(For α-Step) U*1 (For Servo Motor) [ ! ]For combination of motors and cables, see the table below. |
60×60 | 30 | 4.6 (4.7*3) |
5µm | 20'' | 15'' |
650 | 50 | 4.9 (5.0*3) |
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Motor | Cable |
C,F,G | N (Not Provided) |
MA | M |
PA | P |
U | U |
Motor | (mm/sec) |
C |
20 |
F | 30 |
G | 15 |
MA | 25 |
PA | 40 |
U | 50 |
Feed Screw | Ball Screw Ø8, Lead 1 | |
Guide | Linear Ball Guide | |
Resolution | Full | 2µm |
Half | 1µm | |
Fine(At 1/20) | 0.1µm | |
Max. Speed | 20mm/sec | |
Positioning repeatability | ±0.5µm | |
Load Capacity*4 | 68.6N | |
Lost Motion | 1µm | |
Backlash | 1µm | |
Straightness | 3µm | |
Parallelism | 15µm | |
Motion Parallelism | 10µm |
Motor | C | F | G | MA | PA | U | |
Standard | High Torque | High Resolution | With Brake | Stepping-out Prevention | High Speed | ||
Motor | Type | 5-Phase Stepping Motor 0.75A/Phase | α-Step Motor | AC Servo Motor | |||
Step Angle | 0.72° | 0.72° | 0.36° | 0.72° | 0.36° (When 1000P/R is set) |
18-bit Encoder (262144P/R) |
|
Connector | Applicable Receptacle Connector | HR10A-10P-12S (73) (Hirose Electric Co., LTD.) | 5559-06R-210 (Molex Japan LLC) |
43020-1000 (Molex Japan LLC) |
Motor Cable JN4FT04SJ1-R (Japan Aviation Electronics Industry, Ltd.) |
||
Encoder: 1674320-1 (Tyco Electronics Japan G.K.) |
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Sensor | Limit Sensor | Provided | |||||
Home Sensor | Not Provided by standard (Photomicrosensor PM-L25 (Panasonic Industrial Devices SUNX Co., Ltd.) is available as the option.) | ||||||
Near Home Sensor | - | ||||||
Power Supply Voltage | DC5~24V±10% | ||||||
Current Consumption | 45mA or less (15mA or less per sensor) | ||||||
Control Output | NPN Open Collector Output DC30V or less, 50mA or less Residual Voltage 2V or less (when load current is 50mA) Residual Voltage 1V or less (when load current is 16mA) |
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Output Logic | Detecting (Dark): Output Transistor OFF (Non-Conducting) |
Type5 | After detection is executed in the CCW direction, the process of detecting in the CW direction is begun based on the CCWLS signal. |
Type6 | After detection is executed in the CW direction, the process of detecting in the CCW direction is begun based on the CWLS signal. |
Type11 | After Type 5 is executed, the process of detecting in the CCW direction is begun based on the TIMING signal. |
Type12 | After Type 6 is executed, the process of detecting in the CW direction is begun based on the TIMING signal. |
Type | XYZ Axis Stage | Material | 440C Stainless Steel | Guide | Linear Ball Guide |
---|---|---|---|---|---|
Table feeding methods | Ball screw | Table Length(mm) | 60 | Table width(mm) | 60 |
Z-Axis Stage Surface | Vertical | Surface Treatment | Electroless Nickel Plating | Through Hole (Table Center Hole) | No |
Load Capacity (Range)(N) | 50.1~100 | Allowable Load(N) | 68.6 | Positioning Accuracy(µm) | 5 |
Sensors | Limit (Home can be option specified) |
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