Slide Guide Stage (KZS)

Slide Guide Stage (KZS)

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  • KZS18100-N (Stroke 100mm / Cover type N)
  • KZS18100-C (Stroke 100mm / Cover type C)
  • KZS18200-N (Stroke 200mm / Cover type N)
  • KZS18200-C (Stroke 200mm / Cover type C)
  • KZS18300-N (Stroke 300mm / Cover type N)
  • KZS18300-C (Stroke 300mm / Cover type C)
  • Volume Discount is available

Slide guide stage (Z-axis) designed for "long stroke and high load capacity."[Features]・ Long stroke: A long stroke is realized by adopting a slide guide for the guide mechanism
・ High speed: The ball screw with 5 mm lead realizes high speed
[A wide range of options]・ Cover selection: An optional type with a cover is available for fall prevention of foreign objects and to prevent grease from scattering
・ Motor selection: You can select from the following motors according to your application
 Stepper motor: Standard│with electromagnetic brake (fall prevention)│AlphaStep (step-out-less) servo motor: AC servo motor (High-speed compatibility)
[Applications]・ Precision adjustment of cameras, microscopes, sensors and optical components
・ For positioning during production, assembly and inspection processes related to semiconductors and measuring instruments

(i)Caution

  • The motorized stage, dedicated cables, and peripherals belong to RoHS Directive Category 9 “Monitoring and control equipment” and will be exempted from the usage restrictions of phthalate esters until July 21, 2021.
  • These products are not compliant with restrictions on phthalates, but are compliant with restrictions on 6 other substances.

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Part Number

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Part Number
KZS18100-C5-J
KZS18100-C5-J-K
KZS18100-C5-J-L
KZS18100-C5-JA
KZS18100-C5-JA-K
KZS18100-C5-JA-L
KZS18100-C5-JB
KZS18100-C5-JB-K
KZS18100-C5-JB-L
KZS18100-C5-JC
KZS18100-C5-JC-K
KZS18100-C5-JC-L
KZS18100-C5-JD
KZS18100-C5-JD-K
KZS18100-C5-JD-L
KZS18100-C5-JE
KZS18100-C5-JE-K
KZS18100-C5-JE-L
KZS18100-C5-JF
KZS18100-C5-JF-K
KZS18100-C5-JF-L
KZS18100-C5-JG
KZS18100-C5-JG-K
KZS18100-C5-JG-L
KZS18100-C5-JH
KZS18100-C5-JH-K
KZS18100-C5-JH-L
KZS18100-C5-JJ
KZS18100-C5-JJ-K
KZS18100-C5-JJ-L
KZS18100-C5-QAP
KZS18100-C5-QAP-K
KZS18100-C5-QAP-L
KZS18100-C5-SAM
KZS18100-C5-SAM-K
KZS18100-C5-SAM-L
KZS18100-C5-WAU
KZS18100-C5-WAU-K
KZS18100-C5-WAU-L
KZS18100-N5-J
KZS18100-N5-J-K
KZS18100-N5-J-L
KZS18100-N5-JA
KZS18100-N5-JA-K
KZS18100-N5-JA-L
KZS18100-N5-JB
KZS18100-N5-JB-K
KZS18100-N5-JB-L
KZS18100-N5-JC
KZS18100-N5-JC-K
KZS18100-N5-JC-L
KZS18100-N5-JD
KZS18100-N5-JD-K
KZS18100-N5-JD-L
KZS18100-N5-JE
KZS18100-N5-JE-K
KZS18100-N5-JE-L
KZS18100-N5-JF
KZS18100-N5-JF-K
KZS18100-N5-JF-L
Part NumberVolume DiscountDays to Ship RoHSMotor, Motor Characteristics Minimum Resolution
(µm)
Stroke (Z Distance)
(mm)
Through Hole (Table Center Hole) Maximum Velocity
(mm/sec)
Positioning Accuracy
(µm)
With / Without Cover Cable Option Vertical degree Grease Specifications Dead weight
(kg)
Accessories Resolution Backlash
(μm)
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesBlank: Without cable50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesBlank: Without cable50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesBlank: Without cable50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesA: Standard cable 2 m, connectors on both ends50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesA: Standard cable 2 m, connectors on both ends50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesA: Standard cable 2 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesB: Standard cable 2 m, discrete on one end50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesB: Standard cable 2 m, discrete on one end50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesB: Standard cable 2 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesC: Standard cable 4 m, connectors on both ends50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesC: Standard cable 4 m, connectors on both ends50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesC: Standard cable 4 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesD: Standard cable 4 m, discrete on one end50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesD: Standard cable 4 m, discrete on one end50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesD: Standard cable 4 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesE: Connector only50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesE: Connector only50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesE: Connector only50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesF: Robot cable 2 m, connectors on both ends50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesF: Robot cable 2 m, connectors on both ends50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesF: Robot cable 2 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesG: Robot cable 2 m, discrete on one end50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesG: Robot cable 2 m, discrete on one end50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesG: Robot cable 2 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesH: Robot cable 4 m, connectors on both ends50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesH: Robot cable 4 m, connectors on both ends50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesH: Robot cable 4 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesJ: Robot cable 4 m, discrete on one end50Blank: Clean environment grease (AFF)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesJ: Robot cable 4 m, discrete on one end50K: Clean environment grease (LG2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015C: YesJ: Robot cable 4 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)16.24Hex socket head bolt M6-25 × 4 pcs. / robot cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

10[α Step Motor] α Stepper motor10100No10015C: YesP: Cable for AlphaStep motor50Blank: Clean environment grease (AFF)13.7Hex socket head bolt M6-25 × 4 pcs. / cable for a AlphaStep stepper motor5 μm (At 1,000P/R setting)2
Available

Quote

10[α Step Motor] α Stepper motor10100No10015C: YesP: Cable for AlphaStep motor50K: Clean environment grease (LG2)13.7Hex socket head bolt M6-25 × 4 pcs. / cable for a AlphaStep stepper motor5 μm (At 1,000P/R setting)2
Available

Quote

10[α Step Motor] α Stepper motor10100No10015C: YesP: Cable for AlphaStep motor50L: Vacuum grease (Fomblin YVAC2)13.7Hex socket head bolt M6-25 × 4 pcs. / cable for a AlphaStep stepper motor5 μm (At 1,000P/R setting)2
Available

Quote

-With 5-Phase Stepper motor Brake-100-14015C: YesM: Cable for unit with electromagnetic brake50Blank: Clean environment grease (AFF)14.3Hex socket head bolt M6-25 × 4 pcs. / cable for unit with electromagnetic brakeFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

10With 5-Phase Stepper motor Brake10100No14015C: YesM: Cable for unit with electromagnetic brake50K: Clean environment grease (LG2)14.3Hex socket head bolt M6-25 × 4 pcs. / cable for unit with electromagnetic brakeFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

10With 5-Phase Stepper motor Brake10100No14015C: YesM: Cable for unit with electromagnetic brake50L: Vacuum grease (Fomblin YVAC2)14.3Hex socket head bolt M6-25 × 4 pcs. / cable for unit with electromagnetic brakeFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

10[AC Servo Motor] AC servo motor10100No20015C: YesU: Cable for servo motor50Blank: Clean environment grease (AFF)13.76Hex socket head bolt M6-25 × 4 pcs. / servo motor cable22-bit encoder (4194304P/R)2
Available

Quote

10[AC Servo Motor] AC servo motor10100No20015C: YesU: Cable for servo motor50K: Clean environment grease (LG2)13.76Hex socket head bolt M6-25 × 4 pcs. / servo motor cable22-bit encoder (4194304P/R)2
Available

Quote

10[AC Servo Motor] AC servo motor10100No20015C: YesU: Cable for servo motor50L: Vacuum grease (Fomblin YVAC2)13.76Hex socket head bolt M6-25 × 4 pcs. / servo motor cable22-bit encoder (4194304P/R)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoBlank: Without cable50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoBlank: Without cable50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoBlank: Without cable50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs.Full 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoA: Standard cable 2 m, connectors on both ends50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoA: Standard cable 2 m, connectors on both ends50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoA: Standard cable 2 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoB: Standard cable 2 m, discrete on one end50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoB: Standard cable 2 m, discrete on one end50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoB: Standard cable 2 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 2 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoC: Standard cable 4 m, connectors on both ends50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoC: Standard cable 4 m, connectors on both ends50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoC: Standard cable 4 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoD: Standard cable 4 m, discrete on one end50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoD: Standard cable 4 m, discrete on one end50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoD: Standard cable 4 m, discrete on one end50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / standard cable, 4 m, discrete on one endFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoE: Connector only50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoE: Connector only50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoE: Connector only50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / connector onlyFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoF: Robot cable 2 m, connectors on both ends50Blank: Clean environment grease (AFF)13.9Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoF: Robot cable 2 m, connectors on both ends50K: Clean environment grease (LG2)13.9Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2
Available

Quote

105-Phase Stepper motor Standard10100No3015N: NoF: Robot cable 2 m, connectors on both ends50L: Vacuum grease (Fomblin YVAC2)13.9Hex socket head bolt M6-25 × 4 pcs. / robot cable, 2 m, connectors on both endsFull 10 μm / Half 5 μm / MS 0.5 μm (when divided into 1/20)2

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Basic Information

Type Z-Axis Stages Table Material Aluminum Guiding Mechanism Slide Guide
Feeding Method Ball screw Table Size (Length) L(mm) 180 Table Size (Width) W(mm) 180
Z-Axis Stage Surface Vertical Table Surface Treatment Black Anodize Load Capacity (Range)(N) 50.1~100
Allowable Load(N) 98 Sensors Limit+Home+Near Home Lead selection(mm) 5
Positioning Repeatability(±dig) 1

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