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Stage selection table

Linear stage (X-axis, XY-axis, Z-axis)

Load capacity
(N)		 Appearance image Travel Distance (mm) Stage dimension (mm) Accuracy Features TYPE
~ ± 10 ~ ± 100 ± 100 ~ X-axis XY axis Z axis
~ 19.6

Set screw type

± 5, ± 7.5

 20, 25,
40, 60		 Simple adjustment
(no regulation)		 Standard XKNG
XKNGZ		 XYKNG ZKNG

Key guide type

15,20

 Width: 40,60 Reinforced clamp XKYF
XKYL		 - -

Lead screw type

± 2.5

 13x27 compact XSEN - -

5.6-154

 Width: 6.7
Length: 16,18,25,31.4		 Long stroke XSENC - -

twenty five

 29x50 Reinforced clamp XKCS - -
~ 39.2

Lead screw type (square)

± 5, ± 7, ± 8

 25, 40, 60 Medium accuracy
(50 μm)		 Standard XFES XYFES ZFES

± 5, ± 7, ± 9

 High accuracy
(30 μm)		 Standard XEG XYEG ZEG
Space saving ―――― DSXYEG ――――
Handle extension XEGL XYEGL ZEGL
Reinforced clamp XEGCL XYEGCL ZEGCL

± 3, ± 5, ± 7

 Hex wrench type XEEG XYEEG ZEEG

± 11, ± 21

 40, 60 With knock hole XSC XYSC ZSC

Handle extension with knock hole		 XSCL XYSCL ――――

Lead screw type (rectangular)

± 7, ± 9, ± 13, ± 17, ± 23

 20, 25,
40, 60, 25x40,
40x60		 Simple adjustment
(no regulation)		 Standard XKNEJ
XKJM		 XYKNEJ ZKNEJ

± 10, ± 20, ± 35

 40, 60, 40x60,
40x90		 Medium accuracy
(50 μm)		 Standard XFHT ―――― ――――

± 21, ± 35

 40x60,
40x90		 High accuracy
(30 μm)		 Standard XSL XYSL ZSL
Reinforced clamp XSLCL XYSLCL ZSLCL
Thin XSLC XYSLC ZSLC

± 12, ± 16, ± 40

 Width: 24.8
Length: 42,50,100		 Face width slim XSSL ―――― ――――

± 12

 24.8x42 Face width slim thin XSSLC ―――― ――――

± 27, ± 42, ± 57

 25x40 Long stroke XLSL ―――― ZLSL

Rack & pinion type

± 12, ± 14, ± 23

 25x40,
40x60,
40x90		 Simple adjustment
(no regulation)		 Standard XKRG
XKRKG		 XYKRG ――――

± 16, ± 21, ± 35

 Medium accuracy
(50 μm)		 Standard XDTS XYDTS ZDTS

± 15, ± 20, ± 35

 Thin XDTSC XYDTSC ZDTSC

± 5, ± 10, ± 20

 25, 40, 60 High accuracy
(30 μm)		 Standard
(square)		 XFG XYFG ZFG

± 10, ± 20

 40, 60 Coarse fine movement handle XSFG ―――― ――――

± 12, ± 21, ± 35, ± 60

 24.8x42,
40x60,
40x90,
40x140		 Standard
(rectangle)		 XWG XYWG ZWG
Reinforced clamp XWGCL XYWGCL ZWGCL
Handle extension XWGL ―――― ――――

Rack & pinion type
(long)

± 30, ± 40, ± 60, ± 90

 30x50 Medium accuracy
(50 μm)		 Long stroke XDTLS ―――― ZDTLS

60,160,260,360

 25x42 High accuracy
(no regulation)		 Super long stroke
(block combination)		 XLARGE ―――― ――――

± 15, ± 25, ± 40, ± 65, ± 90

 High accuracy
(30 μm)		 Long stroke XLWG ―――― ZLWG
~ 343

± 140

 40 x 50 Super long stroke XLONG ―――― ――――

Cross roller

± 3.2, ± 6.5, ± 12.5, ± 25

 25, 40, 50,
60, 80, 90,
100, 120		 Medium accuracy
(30 μm)		 Standard XCRS XYCRS ZCRS

± 6.5

 40, 60, 80 Thin ―――― XYCRSC ――――

± 3.2, ± 6.5, ± 12.5, ± 25

 25, 40, 60,
80, 100, 120		 High accuracy
(3 μm)		 Standard XPG XYPG
XYPCG		 ZPG

± 6.5

 40, 60 With knock hole ―――― XYPGN ――――

± 6.5, ± 12.5

 40, 60, 80 Thin ―――― XYSPG ――――

± 12.5

 100 Through hole ―――― XYPPG ――――

± 6.5, ± 20

 25x60,
60x110		 Long stroke XLPG ―――― ――――

± 3.2, ± 6.5, ± 12.5

 25, 40, 60, 80 Specification selection FSXC ―――― ――――

Linear ball

± 6.5

 40, 60 Medium accuracy
(10 μm)		 stainless XLBS XYLBS ZLBS

± 3.2, ± 6.5, ± 12.5

 25, 40, 50,
60, 70, 80,
100		 High accuracy
(1 μm ~)		 stainless XSG
XSGB
XSCG
XSCGB		 XYSG
XYSGB
XYSCG
XYSCGB		 ZSG
ZSGB
ZSCG
ZSCGB
Space saving ―――― DSXYSGB
DSXYSCG		 ――――

± 6.5, ± 12.5

 40, 50, 60,
70, 80, 100		 Digital
micrometer head		 XSDG ―――― ――――
40, 50, 60,
70, 80		 Coarse and fine movement
micrometer head		 XSKG XYSKG ――――

± 3.2, ± 6.5

 25, 40, 50,
60, 70		 Counter clamp XSGNT XYSGNT ――――

± 12.5, ± 25

 40x80,
60x120		 Face width slim XSGL
XSBGL		 ―――― ――――

± 3.2, ± 6.5

 25, 40, 50,
60, 70, 80		 Specification selection FSXR FSXYR FSZR
~ 1176

Lead screw type

± 3, ± 5

 40, 60 Simple adjustment
(no regulation)		 Medium load capacity XKDSP ―――― ――――

10,15,25,30,40,50,60,70

 40, 60, 80, 25x40,
40x80		 Stroke selection XKNEF ―――― ――――

25,40,50,75

 40, 60, 80,
40x80		 Big lead XKS XYKS ――――

50,100,150

 80 High load capacity XKST ―――― ZKST

30,75 on one side

 20x40,
40x60		 Left and right screw type opening and
closing width adjustment		 XANON ―――― ――――

Rack & pinion type

± 12, ± 21, ± 35

 24.8x40,
40x60,
40x90		 High accuracy
(30 μm ~)		 High load capacity XWGSR ―――― ――――

Linear guide

128 128

 80 Long stroke XLSG ―――― ――――

Cross roller

± 20, ± 25, ± 30, ± 40, ± 50

 80, 100,
120, 150,
200		 High accuracy
(6 μm ~)		 High load capacity XTOUGH ―――― ――――

Horizontal plane Z

Load capacity
(N)		 Appearance image Travel Distance
(mm)		 Stage surface
(mm)		 Parallelism Precision band
(straightness)		 Features TYPE
6.9 to 14.7

ZLFG

 ± 2.5, ± 5, ± 10 25, 40, 60 No regulation High accuracy
(30 μm)		 Low Cost ZLFG
9.8-39.2

ZLPCG

 ± 2, ± 3, ± 5 25, 40,
60, 80		 50 μm, 100 μm High accuracy
(3 μm)		 Standard ZLPG
ZLPCG
19.6 to 29.4

ZLTG

 ± 3 40, 60, 80 100 μm High accuracy
(5 μm)		 Thin ZLTG
ZLTCG
29.4-49

ZLLB

 ± 3, ± 5 40, 60 80 μm Medium precision made of steel ZLLB
29.4-58.8

ZLPGS

 ± 3 40, 60 100 μm High accuracy
(3 μm)		 Made of high load capacity
stainless steel		 ZLPGS
ZLPCGS
68.6

ZHRD

 30 60, 90 50 μm High precision High precision ,
high load capacity
, long stroke		 ZHRD
68.6-98

ZLJG

 40, 70 80x120,
120x180		 200 μm High precision High load capacity ZLJG

Rotate

Load capacity
(N)		 Appearance image Travel Distance
(mm)		 Stage surface
(mm)		 Minimum reading angle
(degrees, minutes, seconds / scale)		 Precision band
(straightness)		 Features TYPE
9.8 to 14.7

XKRC

 ± 22.5 ° φ35, φ55 <No scale> Low accuracy
(simple)		 Easy adjustment
low cost		 XKRC
9.8-29.4

RTSS

 ± 10 ° 40, 60 1'51 ", 1'12" * Medium accuracy
(standard)		 Easy adjustment
mounting surface is square		 RTSS
9.8-39.2

RTRM

 Coarse movement: 360 °
Fine movement: ± 5 °		 φ40, φ60, φ80 10.08 "* Medium accuracy
(standard)		 Low Cost
coarse and fine adjustment		 RTRS
RTRM
9.8

RPGE

 Coarse movement: 360 °
Fine movement: ± 3 °		 φ24 0.5 ° High accuracy
(eccentricity 0.05 mm)		 Small diameter
coarse fine movement adjustment		 RPGE
9.8-49

RPG

 Coarse movement: 360 °
Fine movement: ± 5 °		 φ38, φ60,
φ85, φ110		 0.2 °, 0.1 ° * Coarse fine movement adjustment RPG
49-58.8

RPGS

 Coarse movement: 360 °
Fine movement: ± 5 °		 φ60, φ85 55 ", 42" * Stainless steel
coarse fine movement adjustment		 RPGS
58.8

RPGT

 Coarse movement: 360 °
Fine movement: ± 5 °		 φ100 32 "*
Coarse fine movement adjustment with through hole		 RPGT
68.6

REG

 Coarse: 360 ° φ25, φ40, φ60 5 °, 2 °, 1 ° low cost REG
980 to 1960

KUS

 Coarse: 360 ° φ48, φ98, φ198 30 ° Low accuracy
(simple)		 Steel
simple adjustment
high load capacity		 KUS

Gonio / Tilt

Load capacity
(N)		 Appearance image Travel Distance
(mm)		 Stage surface
(mm)		 Minimum reading angle
(degrees, minutes, seconds / scale)		 Features TYPE
1 axis 2 axes
9.8-58.8

GFG

 ± 8 °
~ ± 25 °		 25, 30, 40,
50, 60, 80		 0.1 ° 2-axis combination product available GFG GFWG
29.4-49

GPG

 ± 2.5 °
to ± 7 °		 40, 50,
60, 70		 15 "-53"
(micrometer)		 Finely adjustable
2-axis combination product available		 GPG GPWG

Stage with multiple axes integrated

Adjustment axis Appearance image Travel Distance
(mm)		 Stage surface
(mm)		 Load capacity
(N)		 Stage thickness
(mm)		 Features TYPE
Rotation
+ tilt

TLSG

 Rotation: ± 2 °
Tilt: ± 3 °		 58x60 9.8 18.5
Achieves rotation and tilt adjustment at low cost		 TLSG
XY axis
+ rotation

XYRSL

 Linear movement: ± 21, ± 35
rotations: 360 °		 φ60, φ90 34.3 45,50 Compact 3-axis adjustment XYRSL
X-axis
+ horizontal Z-axis

XZLNG

 X-axis: ± 5, ± 7, ± 10
Water Z-axis: +10, +26		 25, 40, 60 34.3 35,40,60 Compact 2-axis adjustment XZLNG
XYZ axes

STLXYZ35

 X-axis: 20
Y-axis: 30
Z-axis: 60		 24.5x35 19.6 ―――― Compactly
realizes linear motion 3-axis adjustment		 STLXYZ